Project information
Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
- Project Identification
- GA101/01/1104
- Project Period
- 1/2001 - 1/2003
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
- Cooperating Organization
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Institute of Scientific Instruments of the ASCR, v. v. i.
- Responsible person Ing. Josef Lazar , Dr.
- Responsible person prof. RNDr. Miloslav Ohlídal, CSc.
The target of the project is a realisation of a laboratory instrument enabling us to measure surface roughness in a non-destructive way in the range from tens of nanometers to tens of micrometers without a priori assumptions concerning a character of the surface. The level of an information content is high (it is possible to determine all-important characteristics of the surface roughness) and it is possible to get results in the real time. The instrument proposed is a laser interference holographic mic roscope of an original construction with a laser light source tuneable in its wavelength (INNOVA Spectrum laser and the semiconductor laser, adapted version of which will be realised by the 2nd joint applicant workplace). In the output plane of the micro scope a hologram of the surface is created. This hologram is through a microobjective recorded by a digital camera. This procedure is performed consecutively with two selected wavelengths. A computer performs a reconstruction of the superposed holograms.
Publications
Total number of publications: 16
2003
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Srovnání snímků NSOM a AFM při studiu vybraných objektů
Československý časopis pro fyziku, year: 2003, volume: 47, edition: 6-7s
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Theoretical analysis of the atomic force microscopy characterization of columnar thin films
Ultramicroscopy, year: 2003, volume: 94, edition: 1
2002
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Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method
Surface and Interface Analysis, year: 2002, volume: 34, edition: 1
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Applications of atomic force microscopy for thin film boundary measurements
Jemná mechanika a optika, year: 2002, volume: 47, edition: 6-7
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Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods
Surface and Interface Analysis, year: 2002, volume: 34, edition: 1
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Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method
Surface and Interface Analysis, year: 2002, volume: 34, edition: 1