Go to main content | Go to main menu | Go to search

Project information
Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method

Investor logo
Project Identification
GA202/01/1110
Project Period
1/2001 - 1/2003
Investor / Pogramme / Project type
Czech Science Foundation
  • Standard Projects
MU Faculty or unit
Faculty of Science
Cooperating Organization
Brno University of Technology
Czech Meteorological Institute
  • Responsible person RNDr. Pavel Klenovský

The aim of this project is to perform the systematic study of the optical and mechanical properties of diamond like carbon (DLC) thin films containing silicon (DLC:Si). Within this study a new optical method based on combining spectroscopic ellipsometry and spectroscopic reflectometry will be used to determine the optical parameters of the thin films studied. Within this method the model respecting defects of the DLC:Si together with the new model of dispersion of the optical constants of these films wi ll be employed. Using the standard microindentation methods and modem nanoindentation ones the mechanical properties of the films will be investigated. A modification of holographic interferometry will be employed for measuring the distribution of the in ternal stresses inside the films investigated. Moreover, the influence of technological conditions of preparing the DLC:Si films on their optical and mechanical properties will be studied systematically. Practical conclusions will be implied from the stu

Publications

Total number of publications: 20

2004

2003

Previous 1 2 Next

You are running an old browser version. We recommend updating your browser to its latest version.