doc. Mgr. Pavel Dvořák, Ph.D.

2010

• Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages

  DVOŘÁK Pavel VAŠINA Petr

  Article in Periodical

  Plasma Sources Sci. Technol., year: 2010, volume: 19, edition: 5

• Monitoring of PVD, PECVD and etching plasmas using Fourier components of RF voltage

  DVOŘÁK Pavel VAŠINA Petr BURŠÍKOVÁ Vilma ŽEMLIČKA Radek

  Article in Periodical

  Plasma Physics and Controlled Fusion, year: 2010, volume: 52, edition: 12, DOI

2009

• Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process

  VAŠINA Petr DVOŘÁK Pavel

  Article in Periodical

  Europhysics Letters, year: 2009, volume: 85, edition: 1

• Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process

  VAŠINA Petr DVOŘÁK Pavel

  Article in Proceedings

  Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes, year: 2009

• Higher harmonics of discharge voltage as tool to control accurately state of RF sputtering deposition process

  DVOŘÁK Pavel VAŠINA Petr

  Conference abstract

  Year: 2009, type: Conference abstract

• Higher harmonics of plasma potential in capacitively coupled discharges

  DVOŘÁK Pavel MORAVEC Zdeněk

  Article in Proceedings

  Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts, year: 2009

• Is it possible to control degree of target poisoning during RF reactive magnetron sputtering by higher harmonic frequencies of discharge voltage?

  VAŠINA Petr DVOŘÁK Pavel

  Article in Proceedings

  Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts, year: 2009

• Jeskyně Kozí díra

  SUCHOMEL Martin DVOŘÁK Zdeněk DVOŘÁK Pavel MAREČKOVÁ Jana OLBRECHT Martin KAHLE Vladislav ČÁSLAVSKÝ Petr

  Year: 2009

• Measurement of plasma potential waveform in capacitive discharge

  DVOŘÁK Pavel

  Conference abstract

  Year: 2009, type: Conference abstract

• Plasma diagnostics using electron paramagnetic resonance

  KUDRLE Vít TÁLSKÝ Antonín JANČA Jan ZVONÍČEK Vilém KUDLÁČ Aleš KŘÁPEK Vlastimil VAŠINA Petr DOLEŽAL Vojtěch URBÁNEK Michal BOTOŠ Pavel MRÁZKOVÁ Martina DVOŘÁK Pavel

  Article in Proceedings

  Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics, year: 2009